2 presentation(s) on 'khz'

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NWO 2004 NWO 2004

Tags: 0 , 1 , 2 , 2004 , 3 , Cm2 , Frequency , Grid , KHz , Matrix , MM , NWO , Ofelectrodes , PO , Sampling , Spacing , Spoon

By:  Charlie

Education 56 months ago

Pulsed-bias Sputter Deposition of Chromia and Alumina films at Low T Pulsed-bias Sputter Deposition of Chromia and Alumina films at Low T

This work uses a novel approach of combined medium frequency (20 – 350 kHz) asymmetric bipolar pulsed magnetron sputtering (pulsed-DC) and pulsed substrate biasing to reactively deposit Cr2O3 and Al2O3 thin films at substrate temperatures of the order of 100 °C. Usually in such cases, the target and the substrate are pulsed at the same frequency [single-frequency (1F) mode] in either synchronous (master-slave) or asynchronous mode. The latter ... Shared on http://www.vacuumcoating.info

Tags: Dual , Frequency , Magnetron , Processing , PVD , Reactive , Sputtering , VacuumCoating

By:  vacuumcoat

Science & Technology 6 months ago