authorSTREAM Latest Presentations for Tag(s): CMOSCopyright 2007 authorSTREAM.com. All rights reserved.http://www.authorstream.com/authorSTREAM Latest Presentations for Tag(s): CMOS56/2/2012 7:45:51 PM<![CDATA[The Nature of the III-V/Oxide Interface ]]>
Added: Oct 21, 2011
By: vacuumcoat
Views: 130
III-V materials such as In0.53Ga0.47As are promising candidates for the scaling of n-channel MOS and MOSFET devices beyond the 22 nm node as a result of their high electron mobility. However, problems have been encountered when preparing gate oxide layers on this material resulting from the presence of native oxides which are significantly more complex than those found on silicon. Given the structural and chemical mismatch between the III-V and ... Shared on http://www.vacuumcoating.info
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