Graphic Era UniversityDehradun : Graphic Era UniversityDehradun A Report on
A Break Through Technology”
Vipin kaushik Slide 2: Micro-electromechanical Systems
(MEMS) based advanced high
performance Radio Frequency (RF)
systems What is MEMS ? : What is MEMS ? MEMS or Micro Electro Mechanical Systems is a technique of combining Electrical and Mechanical components together on a chip, to produce a system of miniature dimensions ..
By miniature, we mean dimensions less than the thickness of human hair !!!! Same game, different names : Same game, different names USA – MEMS
Europe – Microsystem technology
Japan - Micromachines Why MEMS? • Miniaturization with no loss of functionality• Integration to form a monolithic system• Improved reproducibility, reliability and accuracy : Why MEMS? • Miniaturization with no loss of functionality• Integration to form a monolithic system• Improved reproducibility, reliability and accuracy Slide 6: • Low power
• Fast actuation techniques
• Improved selectivity and sensitivity
• MEMS may be the ONLY solution The wonder called nanotechnology : The wonder called nanotechnology Nanotechnology is the technology of arranging atoms and molecules in a material.
This allows to alter the properties of a material and build structures of desired features.
A nanometer is one-billionth of a meter.
Nanotechnology makes it possible to manufacture devices 80,000 times smaller than the thickness of human hair !! How MEMS are made? : How MEMS are made? There are three basic building blocks in MEMS technology.
A MEMS process is usually a structured sequence of these operations to form actual devices.
Etching processes Series switches : Series switches ROLE OF MEMS IN SENSORS : ROLE OF MEMS IN SENSORS First things first, what is a Sensor ? : First things first, what is a Sensor ? A device used to measure a physical quantity such as temperature and convert it into an electronic signal of some kind (voltage), without modifying the environment. Sensors in our body : Sensors in our body Mechanoreceptors (feel)
Olfactory System (Nose) What can be sensed? : What can be sensed? Almost Everything!!!
Commonly sensed parameters are :
Pathogens But why mems for sensors? : But why mems for sensors? Sensors made using MEMS are better than
their conventional counterparts because they are :
Smaller in size
Have lower power consumption
More sensitive to input variations
Cheaper due to mass production
Less invasive than larger devices
So good things do come in small
packages !!!! Types of Sensors : Types of Sensors Mechanical Sensors
Chemical and Biological Sensors Mechanical Micro sensors : Mechanical Micro sensors Strain Gauges
Gyroscopes (Rotation rate)
Tactile Sensors (sensory feedback)
Biological Sensors (cochlear implants) ACCELEROMETERS : ACCELEROMETERS Used in deploying airbags, navigation, activity detection for pacemakers Sensors in automobiles : Sensors in automobiles http://mems.colorado.edu/c1.res.ppt/ppt/g.tutorial/ppt.htm MEMS based cochlear implant : MEMS based cochlear implant http://www.accessexcellence.org/AB/BA/biochip3.html Optical Sensors : Optical Sensors Direct Sensors
(Light → Electronic Signal)
(Light → Intermediate energy → Electronic signal)
Biological Light Sensors Sight for the blind : Sight for the blind MEMS based array that may be inserted in the retina of a blind person to provide partial sight Thermal Sensors : Thermal Sensors Thermo mechanical (dimension)
Thermo resistive (resistance)
Biological BioChem Sensors : BioChem Sensors Electronic nose can sense a large number of gases
Electronic tongue can sense a variety of liquids http://www.estcal.com/Products.html http://www.alpha-mos.com/proframe.htm Smart PILL : Smart PILL Implanted in the body
Automatic drug delivery (on demand) http://mmadou.eng.uci.edu/ The BIG question : The BIG question “ Is MEMS really necessary?”
Still in nascent stage to be applied commercially
Research in this area is important, as it probably is the future THANK YOU! : THANK YOU!