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MEMS INTRODUCTION AND APPLICATIONS

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Graphic Era UniversityDehradun : 

Graphic Era UniversityDehradun A Report on “MEMS A Break Through Technology” Presented By:- Vipin kaushik

Slide 2: 

Micro-electromechanical Systems (MEMS) based advanced high performance Radio Frequency (RF) systems

What is MEMS ? : 

What is MEMS ? MEMS or Micro Electro Mechanical Systems is a technique of combining Electrical and Mechanical components together on a chip, to produce a system of miniature dimensions .. By miniature, we mean dimensions less than the thickness of human hair !!!!

Same game, different names : 

Same game, different names USA – MEMS Europe – Microsystem technology Japan - Micromachines

Why MEMS? • Miniaturization with no loss of functionality• Integration to form a monolithic system• Improved reproducibility, reliability and accuracy : 

Why MEMS? • Miniaturization with no loss of functionality• Integration to form a monolithic system• Improved reproducibility, reliability and accuracy

Slide 6: 

• Low power • Fast actuation techniques • Improved selectivity and sensitivity • MEMS may be the ONLY solution

The wonder called nanotechnology : 

The wonder called nanotechnology Nanotechnology is the technology of arranging atoms and molecules in a material. This allows to alter the properties of a material and build structures of desired features. A nanometer is one-billionth of a meter. Nanotechnology makes it possible to manufacture devices 80,000 times smaller than the thickness of human hair !!

How MEMS are made? : 

How MEMS are made? There are three basic building blocks in MEMS technology. A MEMS process is usually a structured sequence of these operations to form actual devices. Deposition processes Photolithography Etching processes

Series switches : 

Series switches

ROLE OF MEMS IN SENSORS : 

ROLE OF MEMS IN SENSORS

First things first, what is a Sensor ? : 

First things first, what is a Sensor ? A device used to measure a physical quantity such as temperature and convert it into an electronic signal of some kind (voltage), without modifying the environment.

Sensors in our body : 

Sensors in our body Mechanoreceptors (feel) Auditory system Visual System Olfactory System (Nose)

What can be sensed? : 

What can be sensed? Almost Everything!!! Commonly sensed parameters are : Pressure Temperature Flow rate Radiation Chemicals Pathogens

But why mems for sensors? : 

But why mems for sensors? Sensors made using MEMS are better than their conventional counterparts because they are : Smaller in size Have lower power consumption More sensitive to input variations Cheaper due to mass production Less invasive than larger devices So good things do come in small packages !!!!

Types of Sensors : 

Types of Sensors Mechanical Sensors Optical Sensors Thermal Sensors Chemical and Biological Sensors

Mechanical Micro sensors : 

Mechanical Micro sensors Strain Gauges Accelerometers Gyroscopes (Rotation rate) Pressure Sensors Microphones Tactile Sensors (sensory feedback) Biological Sensors (cochlear implants)

ACCELEROMETERS : 

ACCELEROMETERS Used in deploying airbags, navigation, activity detection for pacemakers

Sensors in automobiles : 

Sensors in automobiles http://mems.colorado.edu/c1.res.ppt/ppt/g.tutorial/ppt.htm

MEMS based cochlear implant : 

MEMS based cochlear implant http://www.accessexcellence.org/AB/BA/biochip3.html

Optical Sensors : 

Optical Sensors Direct Sensors (Light → Electronic Signal) Photoemissive Photoconductive Indirect Sensors (Light → Intermediate energy → Electronic signal) Pyroelectric detectors Bolometers Biological Light Sensors

Sight for the blind : 

Sight for the blind MEMS based array that may be inserted in the retina of a blind person to provide partial sight

Thermal Sensors : 

Thermal Sensors Thermo mechanical (dimension) Thermo resistive (resistance) Acoustic (sound) Biological

BioChem Sensors : 

BioChem Sensors Electronic nose can sense a large number of gases Electronic tongue can sense a variety of liquids http://www.estcal.com/Products.html http://www.alpha-mos.com/proframe.htm

Smart PILL : 

Smart PILL Implanted in the body Automatic drug delivery (on demand) http://mmadou.eng.uci.edu/

The BIG question : 

The BIG question “ Is MEMS really necessary?” Still in nascent stage to be applied commercially Research in this area is important, as it probably is the future

THANK YOU! : 

THANK YOU!