MEMS AS SENSORS(final)

Role of MEMS in :

Role of MEMS in SENSORS - by soujanya

First things first, what is a Sensor ? :

First things first, what is a Sensor ? A device used to measure a physical quantity (such as temperature) and convert it into an electronic signal of some kind (e.g a voltage), without modifying the environment.

What can be sensed?:

N S E W 2 Axis Magnetic Sensor 2 Axis Accelerometer Light Intensity Sensor Humidity Sensor Pressure Sensor Temperature Sensor What can be sensed? Commonly sensed parameters are : Pressure Temperature Flow rate Radiation Chemicals Pathogens Almost Everything!!!

What is MEMS ?:

What is MEMS ? MEMS or Micro Electro Mechanical Systems is a technique of combining Electrical and Mechanical components together on a chip, to produce a system of miniature dimensions .. By miniature, we mean dimensions less than the thickness of human hair !!!!

The wonder called nanotechnology:

The wonder called nanotechnology Nanotechnology is the technology of arranging atoms and molecules in a material. This allows to alter the properties of a material and build structures of desired features. A nanometer is one-billionth of a meter. Nanotechnology makes it possible to manufacture devices 80,000 times smaller than the thickness of human hair !!

A simple analogy..:

A simple analogy.. The atoms in an object can be compared to the blocks in a building game. In a building game, the blocks can be arranged to create different looking structures. Similarly, atoms can be arranged differently to produce a multitude of devices. This forms the basis of nanotechnology .

But why MEMS for sensors?:

But why MEMS for sensors? Sensors made using MEMS are better than their conventional counterparts because they are : Smaller in size Have lower power consumption More sensitive to input variations Cheaper due to mass production Less invasive than larger devices So good things do come in small packages !!!!

Slide 8:

Comparison between conventional and MEMS based sensor Conventional MEMS based Mass 1587.5 gm 10 gm Size 15x8x5 cm 2x2x0.5 cm Power 35 W ~1mW Cost $20,000 $500

Faster, Smaller, Numerous…..:

Faster, Smaller, Numerous….. From the figure we can see the revolution of MEMS The cost of the chip will be less than a dollar when mass production is done. year log (people per computer) Streaming Data to/from the Physical World

Projected MEMS Market Share 2010:

Projected MEMS Market Share 2010

Types of Sensors:

Types of Sensors Mechanical Sensors Optical Sensors Thermal Sensors Chemical and Biological Sensors

Mechanical Micro sensors:

Services TinyOS Mechanical Micro sensors Strain Gauges Accelerometers Gyroscopes (Rotation rate) Pressure Sensors Microphones Tactile Sensors ( sensory feedback) Biological Sensors ( cochlear implants) Networking

Accelerometers ::

Accelerometers : Used in deploying airbags, navigation, activity detection for pacemakers.

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Scrolling Compensated compass Gaming Wireless pedometer Image stabilization Freefall detection Health monitoring Activity monitoring Alarms Vibration monitoring

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Density & Scale Sample Rate & Precision Mobility Low Latency Disconnection & Lifetime Temperature Navigation Weather forecast Context awareness Fluid level measurement

Sensors in automobiles:

Sensors in automobiles

Sight for the blind:

Sight for the blind MEMS based array that may be inserted in the retina of a blind person to provide partial sight

Chem Bio Sensors:

Chem Bio Sensors Electronic nose can sense a large number of gases Electronic tongue can sense a variety of liquids

Chemical lab on a chip:

Chemical lab on a chip Used to detect chemicals in gas, liquids and DNA

Medical and homeland security applications:

Medical and homeland security applications Biocavity laser Decontamination foam Smart pill Sensors for missile systems

Parameters monitored in marine science:

Parameters monitored in marine science Temperature, pressure, light transmission, tidal and current velocity Plant pigments (chlorophyll), plankton cells Dissolved gases (like oxygen), pH, metals, pesticides Seabed characteristics, Seismic signal

Where are these MEMS devices attached ?:

Where are these MEMS devices attached ? The MEMS devices, in marine sensing maybe attached to: Ships Floating devices (buoys) in the sea Fixed sea structures (like oil rigs) Sea bed using links AUVs

AUV ( Autonomous underwater vehicle ):

AUV ( Autonomous underwater vehicle ) AUVs are unmanned underwater vehicles for real time monitoring in the oceans. AUVs can be equipped with “Lab on a Chip”, a set of sensors developed on a single chip, using MEMS. These “Lab on a Chip” devices can sense a large number of chemical pollutants simultaneously. AUV “ Lab on a Chip”

Hydrophones )))):

Hydrophones )))) Just as microphones collect sounds in air, hydrophones are small devices that detect sounds in water. The sources of sounds in water maybe ships, earthquakes, waves or marine animals.

Digital mammal tags:

Digital mammal tags These are tiny devices attached to animals like whales, sharks, dolphins etc.. Provides vital data about the animal and its surroundings A tag houses Pressure sensor(s) Temperature sensor(s) Hydrophone (sound sensor) Radio transmitter for data collection at remote locations.

MEMS in military operations:

MEMS in military operations An array of MEMS sensors spread on the ocean floor could detect the presence of enemy submarines. MEMS sensors (pressure sensors, accelerometers etc.) are being used in anti-torpedo weapons on submarines and ships. MEMS sensors in torpedoes are responsible for Detonating the torpedo at the right time Hitting the target in a crowded environment Prevent any premature explosion

CONCLUSION :

CONCLUSION MEMS promises to be an effective technique of producing sensors of high quality, at lower costs. Thus we can conclude that the MEMS can create a proactive computing world, connected computing nodes automatically, acquire and act on real-time data about a physical environment, helping to improve lives, promoting a better understanding of the world and enabling people to become more productive .

Queries……..:

Queries…….. Thank u………