operation of a typical diffusion pumped ...

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By: bprasad2005 (30 month(s) ago)

This quite useful for an educator

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Operation Guide : 

Preliminary Rotary pump Diffusion pump Rough pumping the vacuum chamber Pumping to high vacuum To remove/replace items in the chamber Shutting down the system System operation Operation Guide

Preliminary : 

Preliminary This assumes that everything is off initially and that the chamber (bell jar) is in atmospheric pressure to start with Switch on the power Turn on water supply All the valves are closed

Rotary Pump : 

Rotary Pump Switch on the power to rotary pump Pump will be noisy and spew oil vapor out its exhaust, when starting from atmospheric pressure The noise should subside as the vacuum improves

Diffusion Pump : 

Diffusion Pump Open the fore-line valve to the d.P. And wait while the pirani gauge 1 is below 200 milli torr Switch on the diffusion pump heater and wait for half an hour Link Never let a hot D.P. see high or atmospheric pressure

Rough Pumping the Chamber : 

Rough Pumping the Chamber Make sure that the air vent valve to the chamber is closed Close the fore-line valve to the diffusion pump Now open the roughing line valve Link Pressure on the pirani gauge 2 should begin to drop If O.K. Proceed to pumping the chamber to high vacuum else test for leakage

Pumping to High Vacuum : 

Pumping to High Vacuum Close the roughing line valve Open the fore-line valve Then open the high vacuum valve Wait for few minutes then start the ion gauge (penning gauge) Wait till the gauge pressure is above 1?10-5 torr Link A good practice is to switch the gauge off and make only spot checks

To Remove/replace Items in the Bell Jar : 

To Remove/replace Items in the Bell Jar Switch off the ion gauge Close the high vacuum valve Open chamber vent valve Wait for the chamber to rise to atmospheric pressure Raise the bell jar Remove/replace items Check bell jar sealing surface and base plate for dirt and wipe if necessary Cover the bell jar

Shutting Down the System : 

Shutting Down the System Emergency shutdown Close all valves on the system Shut off the diffusion pump Complete shut down Remove items from the chamber and re-evacuate the chamber Switch off the gauges Leave the bell jar under vacuum Switch off power to diffusion pump Run the rotary pump with fore-line valve open (cooling) Close the fore-line valve leaving d.P. Under vacuum Switch off the rotary pump

Slide 9: 

If you can’t get the chamber down to 200 milli torr or less in about 15-20 minutes, there is most likely a leak Close the roughing valve and reopen the fore-line valve and arrange to test the leakage Return