Introduction : Introduction Objective of this project is to design, fabricate, and numerically analyze a MEMS capacitive accelerometer.
Application of this capacitive accelerometer is used for measuring a tilt (or slope) angle of a solar plate collector.
The capacitive accelerometer is an accelerometer that uses capacitive change due to acceleration force as the sensed parameter.
Design & Fabrication : Design & Fabrication Deposition – Spin Coating – Making a photoresist layer.
Photolithography – making a mask.
Dry etching – Removing materials.
The final shape of the accelerometer will be similar to this shape. Top view The three main processes Simple drawing of the processes
Analysis : Analysis Specifications: Range= ±2 g… Damping ration= 0.5 – 1… Bandwidth = 50 Hz – 2.5 kHz
The main challenge of this project will be how to Find the analytical expression considering the accelerometer’s slope and its parameters to predict the tilt or slope angle.
The accelerometer will be used to measure a slope degree of a single axis only.
Thank You : Thank You Any Questions?