mod sell 7

Modu-LabLow Cost Tools for High Tech Learning: 

Modu-Lab Low Cost Tools for High Tech Learning Designed to minimize chemical usage, the Wet Process Module is ideally suited for practicing the basic acid etch and photoresist develop processes in a single-wafer, hands-on environment. All chemicals are safely stored on-board, and vapors are exhausted away from the student. Welded Polypropylene Construction Self Contained Small Foot Print (30”Dx60”Lx48”H) 110 or 220 VAC Sized for Single Wafer Processing 1 Year Warranty Casters for easy mobility Low Cost of Ownership Wet Process Module Spin Dryer N E W !

Slide2: 

Designed to minimize operator exposure, and chemical usage. Dippers hold the substrates and are manually manipulated through slots in the transparent shield. The substrate can be processed through any of 4 acid baths and spray rinsed. Upon removal from the shielded enclosure the vacuum-less spin drier completely dries both the front and back of the substrate in just a few seconds. Lockable Transparent Safety Shield Self Contained Small Foot Print (30”Dx60”Lx48”H) 110 or 220 VAC Sized for Single 4” Wafer Processing 1 Year Warranty Casters for easy mobility Low Cost of Ownership 4 Etch Tanks and Spray Rinse Welded Polypropylene Construction Spin Dryer Wet Etch Module Modu-Lab Low Cost Tools for High Tech Learning

Slide3: 

Physical Vapor Deposition Module The low voltage flash filament will deposit .5µ of almost any metal in a few seconds on 4 substrates simultaneously. The system features full scale pressure measurement and stainless steel vacuum hardware. The electro-pnuematic version features a control system that will only allow actuation of the valves and deposition in the correct sequence. Fully Interlocked Electrical System Stainless Steel Vacuum Hardware 110 or 220 VAC 3.2 CFM Mechanical / Turbomolecular Pump Package 1 Year Warranty Interlocked Control for Vacuum Training Low Cost of Ownership Low Voltage Tungsten Source Full Range Instrumentation Modu-Lab Low Cost Tools for High Tech Learning

Slide4: 

Photolithography Module X,Y,Z and ø Precision Micrometers Exhausted Hot Plate and Spinner Aligner Designed for Transparency Masks 110 or 220 VAC Variable Speed Spinner 1 Year Warranty Temp Controlled Bake Plate Low Cost of Ownership No Mercury Vapor Lamp or Dangerous UV Designed to allow students to align and pattern substrates economically! Spin, bake, align and expose 4” wafers using 25 micron geometry's in ambient light conditions on a single, safe, completely engineered piece of equipment! Masks are prepared on transparencies using a laser or inkjet printer at a cost of about $2.00 per layer! Modu-Lab Low Cost Tools for High Tech Learning

Slide5: 

Diffusion Furnace Module The furnace is a 3 zone quartz tube kiln designed to heat substrates to 1300°C in a contained, controlled atmosphere. This system is a miniature version of the industry standard horizontal diffusion furnace and supports oxidation or dopant drives. The programmable PID controller allows for overnight runs. 1250 ºC Max Temp Stainless Steel Scavenger 220 or 208 VAC Programmable Controller for Overnight Runs 1 Year Warranty 3 Zone PID Temp Control Low Cost of Ownership Optional Mass Flow Controller Gas System Quartzware Included! Quartz Lined Load Tray N E W ! Modu-Lab Low Cost Tools for High Tech Learning

Slide6: 

Oxidation Furnace Module 1000 ºC Max Temp Stainless Steel Scavenger Optional Water Bubbler for Wet Ox 220 or 208 VAC Programmable Controller for Overnight Runs 1 Year Warranty 3 Zone PID Temp Control Low Cost of Ownership Optional TEOS Hotwall LPCVD Optional Mass Flow Controller Gas System Quartz Lined Load Tray N E W ! The furnace is a 3 zone quartz tube kiln designed to heat substrates to 1000°C in a contained, controlled atmosphere. This system is a miniature version of the industry standard horizontal diffusion furnace and supports oxidation anneals, and LPCVP. The programmable PID controller allows for overnight runs. N E W ! Modu-Lab Low Cost Tools for High Tech Learning

Slide7: 

Device Characterization Module The probe station allows finished devices to be tested for various electrical properties. Signals are generated and collected via a National Instruments LabView™ IO card in a standard PC. System executables written by students and instructors from around the world will be available for download on the internet. Stainless Steel Table Top Vacuum Chuck 110 or 220 VAC 30X Microscope 1 Year Warranty LabView™ Data Acquisition Low Cost of Ownership Magnetic Base Probes PC & Monitor Included Modu-Lab Low Cost Tools for High Tech Learning

Slide8: 

“…a revolutionary set of affordable laboratory teaching tools …” John C. Bean John Marshall Money Professor of Electrical Engineering, University of Virginia Committed to Excellence... Modu-Lab Low Cost Tools for High Tech Learning

Slide9: 

“… [ Modu-Lab ] will allow large numbers of young and inexperienced students the golden opportunity of making their own microelectronic device[s]!” Prof. John C. Bean Committed to Education... Dominion Semiconductor / NVCC Hosts Modu-Lab Demo for Virginia Educators Manassas, Va 2/12/99 Modu-Lab Low Cost Tools for High Tech Learning

Slide10: 

Modu-Lab 4 Yr. EE,ME,ET 2 Yr. SMT Nano-Tech Bio-Tech MEMS Opto- Electronics Modu-Lab Jr. High Schools 2 yr. AA S&T Modu-Lab Pro Photovoltaics Ferroelectrics Power Devices Sensors Physics Chemistry Voc. Elec Mathematics Committed to the Future... Effective training programs are vital to the industry as well as the nation. In order to lead in global competition, a high quality workforce must be available. A fundamental understanding of planar processing is essential to enable skills growth commensurate with industry needs. Modu-Lab Low Cost Tools for High Tech Learning