SPI 2009 Booth Presentation PJH

Slide 1: 

October 27-29 2009 Solar Power International Anaheim 2009 … Science & Technology for a better future … 1

Leybold Optics : 

October 27-29 2009 Solar Power International Anaheim 2009 Leybold Optics Introduction Product Portfolio 2

International Reputation : 

October 27-29 2009 Solar Power International Anaheim 2009 International Reputation A synonym for innovation Sets standards Excellent brand recognition 3

Historical Milestones : 

October 27-29 2009 Solar Power International Anaheim 2009 Historical Milestones 4 A successful history of innovation in vacuum technology for over 150 years Over 1,000 systems sold 1850 1967 1987 1993 1996 1999 2001 n Ernst Leybold in Cologne and Wilhelm Carl Heraeus in Hanau establish their companies independently from each other n Heraeus Hochvakuum merges with E. Leybold Nachfolger to form Leybold-Heraeus n Leybold Heraeus is owned by Degussa, Metallgesellschaft and W.C. Heraeus n Due to anti-trust issues, Balzers and Leybold Group divests the CD metallisers and the high vacuum pump business, creating Singulus Technologies AG and Pfeiffer Vacuum Technology AG, respectively n n Leybold AG is sold to Unaxis (now Oerlikon), who merges the business with its Balzers activities, creating the Balzers and Leybold Group, a global leader in the vacuum and thin-film technology industry n Carve-out out of Leybold Optics from Unaxis, to become an independent manufacturer of coating systems for optical applications n On 30 September, EQT acquires Leybold Optics from Unaxis Balzers and Leybold Group’s optics equipment activities (coating technology for glass and optics) and optical components business (thin-firm products for optics) are combined into a new business unit names Optics Division

Global Presence : 

October 27-29 2009 Solar Power International Anaheim 2009 Global Presence 4 competence centres, 10 subsidiaries and a network of agencies worldwide, offering comprehensive coverage and support Dresden / Germany Sales, service, production and R & D Beijing, China Sales, service, production and R & D Alzenau / Germany Sales, service, production and R & D Cary, US Sales, service and production 5

Leybold Optics Solar Product Portfolio : 

October 27-29 2009 Solar Power International Anaheim 2009 Leybold Optics Solar Product Portfolio Introduction Product Portfolio for Thin Film Solar Manufacturing 6

Slide 7: 

October 27-29 2009 Solar Power International Anaheim 2009 Content Solar Thin Film Technologies Photovoltaic Cells (PV) CIS/CIGS Silicon thin film Thin film PV Wafer based PV Organic PV Turn key solution: PECVD systems: aSi/µcSi Sputter systems: front contact back contact Sputter systems: back contact front contact layers for absorber PVD and annealing systems:  absorber Sputter systems: back contact PVD and sputter systems: contacts absorber barrier CdTe 7

Solututions for Rigid or Flexible Substrates : 

October 27-29 2009 Solar Power International Anaheim 2009 Solututions for Rigid or Flexible Substrates Rigid Flexible Web Pilot and R&D Application Production Turn Key 8

Slide 9: 

October 27-29 2009 Solar Power International Anaheim 2009 Web coating systems for Thin Film SolarCustomR&D and PilotFull scale production 9 Web Coating Systems

Pilot and R&D Web Coating Systems : 

October 27-29 2009 Solar Power International Anaheim 2009 Pilot and R&D Web Coating Systems WEB400sp and WEB550sp Pull out mechanism PLC Control Temperature controlled drum Flexible cathode array RF, MF, pDC, DC sputtering Optional winding mechanism Optional gas separation Linear Ion source for cleaning 10

Production Web Coating Systems : 

October 27-29 2009 Solar Power International Anaheim 2009 Custom systems to suit application Flexible substrates including SS, Al, Cu, PI, PET Flexible cathode arrays RF, pDC, MF, and DC sputtering Production Web Coating Systems 11

Slide 12: 

October 27-29 2009 Solar Power International Anaheim 2009 WEB750sp Production WEB systems 12

Production WEB systems : 

October 27-29 2009 Solar Power International Anaheim 2009 Coating module 1 Winding/Unwindingmodule Coating module 2 Interleaf coil Metal web coils Turbo pumps Full 360° design - no touching of the coated surface – patented concept Cylindricalsputter cathodes Planarsputter cathodes Production WEB systems WEB750sp Transfer module Production WEB systems 13

Slide 14: 

October 27-29 2009 Solar Power International Anaheim 2009 planar sputter cathodes for i-ZnO cylindrical sputter cathodes for ZnO:Al2O3 Production WEB systems WEB750sp 14

Slide 15: 

October 27-29 2009 Solar Power International Anaheim 2009 For target exchange/cleaning Production WEB systems WEB750sp Pull Out Flange Design Cathodes on extractable rotating flange Water cooled drum 1.5 m diameter Coated surface untouched until rewind 15

Production WEB systems : 

October 27-29 2009 Solar Power International Anaheim 2009 WEB2000sp Production WEB systems Production WEB systems 35 mm strip substrate Helical winding system Forward/ reverse wind i-ZnO/ AZO process Up to 20 m/min 16

Slide 17: 

October 27-29 2009 Solar Power International Anaheim 2009 In Line coating systems for Thin Film SolarCustomR&D and Pilot Full scale production 17 In Line Coating Systems

Slide 18: 

October 27-29 2009 Solar Power International Anaheim 2009 Modular Design Single or double ended Rotary and planar cathodes Co-sputtering possible RF, DC, pDC, and MF In Line Coating Systems 18

Slide 19: 

October 27-29 2009 Solar Power International Anaheim 2009 R&D In Line systems In-line system A400V7 for R&D with manual load lock 19

Sputter sections with planar and cylindrical magnetrons : 

October 27-29 2009 Solar Power International Anaheim 2009 Sputter sections with planar and cylindrical magnetrons R&D In Line Systems A900V-7 20

Slide 21: 

October 27-29 2009 Solar Power International Anaheim 2009 Sputter Coater for Front and Back Contact 5 process chambers of an A 1500 V-7 sputter system A1500v-7 21

Slide 22: 

October 27-29 2009 Solar Power International Anaheim 2009 Sputter Coater for Front and Back Contact A1500V-7 chambers opened for AZO magnetron maintenance 22

Slide 23: 

October 27-29 2009 Solar Power International Anaheim 2009 Sputter Coater for Front and Back Contact A1500V-7 chamber with rotating magnetron targets Benefits of rotary targets: Higher utilization (>70%) Higher film quality Higher deposition rates 23

Slide 24: 

October 27-29 2009 Solar Power International Anaheim 2009 Load lock/transfer modules Load lock/transfermodules Sputter modules Carrier return transport system Unloading Loading A1500V-7 Production Inline systems Fully automated line with load/ unload 24

Slide 25: 

October 27-29 2009 Solar Power International Anaheim 2009 H1700 Modular design Sputter down Rotary magnetrons Horizontal Sputter Coater 25

Slide 26: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Thin Film Solar Flexible expansion options to suit your capacity plans Turn Key Line for Tandem Silicon Cell 26

Slide 27: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Tandem Silicon Cell Our Core Vacuum Coating Expertise Proven Technology Innovative System Design Extensive process know how PVD sputtering for contacts PECVD for active layer 27

Slide 28: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Tandem Silicon Cell Front and Back End Processing Established PV Industry partners for: Laser Scribing Etch/ washing Lamination Edge deletion Junction box setting Final module testing 28

Flexible, Economic Production Line Concept : 

October 27-29 2009 Solar Power International Anaheim 2009 Flexible, Economic Production Line Concept One level or two level custom layout Simple lift and rotate modules Clean room tunnels over conveyors Linear material flow 29

Slide 30: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Tandem Silicon Cell Tandem Silicon Cell a-Si/ µc-Si Fully upgradeable Phased Expansion “Linear Cluster” PECVD Starting capacity 8 MW and upwards Sputter coated Front and Back contacts Guaranteed efficiency 8.5% (stabilized) 30

Sample Factory Layouts (to Scale) : 

October 27-29 2009 Solar Power International Anaheim 2009 Sample Factory Layouts (to Scale) Layout optimized to customers existing Production Facility Layout optimized for minimum floor space requirement 31

Slide 32: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Tandem Silicon Cell Front/ Back Contacts Vertical sputtering system TCO front contact Al/ Ag back contact Rotating targets for low CoO 32

ZnO:Al – TCO Front Contact : 

October 27-29 2009 Solar Power International Anaheim 2009 ZnO:Al – TCO Front Contact TCO Sputter System 33

Laser Scribing : 

October 27-29 2009 Solar Power International Anaheim 2009 Laser Scribing Laser scribing: P1, P2 and P3 34

PECVD Production System : 

October 27-29 2009 Solar Power International Anaheim 2009 PECVD Production System PECVD Systems 35

Slide 36: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Tandem Silicon Cell PECVD: Active Layer “Phoebus” with unique Linear Cluster geometry Work Flow Process Chambers Pumps Vacuum Tunnel Entrance 36

Leybold Optics PECVD Production System : 

October 27-29 2009 Solar Power International Anaheim 2009 Leybold Optics PECVD Production System 14 Chamber PECVD Production System [>8 MWp/a] 37

Slide 38: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Tandem Silicon Cell Phoebus Benefits Line remains up even if a chamber fails Highly stable process Constant glass temperature Isolated chambers for each process step Easy maintenance Flexible upgrade path 38

AZO/Ag/Al Back Contact In Line Sputter System : 

October 27-29 2009 Solar Power International Anaheim 2009 Back Contact System AZO/Ag/Al Back Contact In Line Sputter System 39

Slide 40: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Tandem Silicon Cell Turn Key Line Benefits Custom design and layout Space efficient, compact line Phased capacity expansion Easy to upgrade 40

Slide 41: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Tandem Silicon Cell 41 Turn Key Line Benefits Proven technology Highly stable processes High throughput Convenient maintenance

Slide 42: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Tandem Silicon Cell 42 Turn Key Line Benefits Ready for future advances Process Technology Roadmap for increased efficiency Hardware upgrade kit for retrofit to existing line

Slide 43: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Tandem Silicon Cell Thin Film Solar Module Performance Tandem Si Cell aSi/ µc-Si Efficiency 9.1% stabilized Generation 5: 1.4 m x 1.1 m 127 W nominal power 43

Slide 44: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Tandem Silicon Cell Thin Film Module Cross Section 44

Slide 45: 

October 27-29 2009 Solar Power International Anaheim 2009 Turn Key Line for Tandem Silicon Cell Cell Performance Tandem Si Cell aSi/ µc-Si 45

Slide 46: 

October 27-29 2009 Solar Power International Anaheim 2009 Leybold Optics Thin Film Solar Products Leybold Optics Thin Film Solar Products Please see booth personnel for further information 46