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Slide1: 

Y. Chauhan, F. Krummenacher and A. M. Ionescu Ecole Polytechnique Fédérale de Lausanne (EPFL), Switzerland Progress and update in HV-EKV Model http://legwwww.epfl.ch

Outline: 

Outline HV-EKV: status and people short comment on evaluation feedback New validations: model validation on SOI-LDMOS (AMIS) demonstration of quasi-saturation modeling on VDMOS (AMIS) NEW – Modeling of Lateral Non-uniform doping in HVMOS (see IEDM’06 paper)

HV-EKV (1): 

HV-EKV (1) EKV • Simple, physically based parameters • Less parameters than BSIM HVEKV: EKV low voltage + Rdrift + charge (Vk)

Slide4: 

HV-EKV (2): scalable drift resistance

HV: who @ EPFL?: 

HV: who @ EPFL? Yogesh Chauhan (100%) Francois Krummenacher (EKV team, 25%) Costin Anghel (now with CEA, France) Adrian M. Ionescu, prof. (~10%) Michel Declercq, prof. (~10%) High Voltage MOS modeling: a strategic field but not our mainstream research à reorganization needed if HV-EKV adopted by CMC Electronics Laboratory (50 people, 4 profs, 24 PhDs)

HV-EKV –status and feedback: 

HV-EKV –status and feedback Status: corrected code released to CMC and evaluations in progress Feedback: simplicity, ease of extr, doc: + Accuracy problem in quasi-saturation: - Accuracy with temperature: - Relatively slow because of Verilog A Compared with sub-circuit models: evaluators agree it’s a compact model! In fact needs appropriate tunning

Problem with quasi-saturation?: 

Problem with quasi-saturation? Tune avsat: quasi-sat for LDMOS and VDMOS! ? !

Model Validation on SOI-LDMOS (1): 

Model Validation on SOI-LDMOS (1) Very accurate on both ID-VG and gm-VG @ low VD

Model Validation on SOI-LDMOS (2): 

Model Validation on SOI-LDMOS (2) Good accuracy on both ID-VG and gm-VG @ high VD

Model Validation on SOI-LDMOS (3): 

Model Validation on SOI-LDMOS (3) quasi-saturation very well modeled good/acceptable accuracy on gds-VD

Quasi-Saturation Modeling on VDMOS: 

Quasi-Saturation Modeling on VDMOS in contrast with some criticism the model is able to accurately describe the quasi-saturation region of VDMOS

New model extension: 

New model extension Model of LAteral Non-Uniform Doping in the intrinsic MOSFET (new EKV-like model for the low voltage transistor) Verilog A code not yet available Evaluated with Matlab code on both numerical simulations and experimental data Reported in IEDM 2006

Why LAMOS modeling?: 

Why LAMOS modeling?

Modeling of Lateral Non-uniform doping in HV-MOSFET: 

Modeling of Lateral Non-uniform doping in HV-MOSFET Assume Total Inversion Charge Density Drain Current Nonlinear ODE Not explicit

Model Validation on 50V VDMOS: 

Model Validation on 50V VDMOS Transfer Characteristics (ID-VG) Weak inversion to Strong inversion transition Subthreshold slope correctly matched Good accuracy

gm-VG for VD=0.1-0.5V: 

gm-VG for VD=0.1-0.5V Subthreshold slope correctly matched Descending slope – drift resistance

Output Characteristics: 

Output Characteristics Linear region correctly modeled by drift resistance. Self Heating Effect Peaks on gds Self-Heating Impact-Ionization

Gate-to-Drain Capacitance CGD vs VG : 

Gate-to-Drain Capacitance CGD vs VG Slope & Peaks – effect of lateral non-uniform doping Sharp decrease – effect of drift region (good modeling of drift region or VK must)

CGS+CGB vs VG : 

CGS+CGB vs VG Peaks – effect of lateral non-uniform doping Sharp decrease and shift of peaks – effect of drift region

CGG vs VG : 

CGG vs VG Peaks and shift of peaks – little contribution from lateral non-uniform doping and greater contribution from drift region

Conclusion: 

Conclusion General HV-MOS Model including lateral non-uniform doping (code will be available in March 2007) Complex capacitance behavior of high voltage MOS was explained using numerical device simulations A new model for lateral non-uniformly doped devices was presented Self-Heating effect included Very good performance in DC and transient operations Model validated on industrial devices – VDMOS and LDMOS Peaks and shift of peaks in capacitances with bias correctly modeled

Slide22: 

Christian Maier, Heinisch Holger Robert Bosch, Germany Andre Baguenier Desormeaux Cadence Design Systems, France B. Desoete AMI Semiconductor, Belgium J.-M. Sallesse, A.S. Roy EPFL, Switzerland Acknowledgements Funded by European Commission project “ROBUSPIC” Website- http://www-g.eng.cam.ac.uk/robuspic/