mems and nems represented by khushi ram bhardwaj

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MEMS & NEMS(ADVANCE TECHNOLOGY OF THE ELECTRONICS & ELECTRICAL WORLD). REPRESENTER KHUSHI RAM BHARDWAJ.

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By: honeypriya (16 month(s) ago)

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Presentation Transcript

MEMS and NEMS : 

MEMS and NEMS 1 KHUSHI RAM BHARDWAJ EE 4TH YEAR 359/07 DAVIET(JALANDHAR)

Topics : 

Topics Introduction Electromechanical Systems MEMS Current Applications NEMS and Nanotechnology Impact of Miniaturization Challenges and Possibilities References 2

INTRODUCTION : 

INTRODUCTION MEMS IS SIMPLY KNOWN AS MICRO ELECTRO MECHANICAL SYSTEM.IT IS THE ART OF MINIATURIZING.MINITUARIZING ART WAS VERY OLDLY USED BY WATCH MAKER IN 13TH CENTURY. 3

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4 Figure 5.1: Jonathan Swift.

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5 . Introduction, Continued

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MST - Microsystems Technology . MEMS - Microelectromechanical System. Manmade devices created using compatible microfabrication techniques that are capable of Converting physical stimuli, events and parameters to electrical, mechanical & optical signals Performing actuation, sensing and other functions 6 Definition and Terms

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7

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8 . Electromechanical Systems Functional Block Diagram

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Materials Crystallography – Forms of Silicon Amorphous Polycrystalline Crystalline “Miller Planes” 9 MEMS Microstructure Fabrication

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Pattern definition Photolithography Deposition Oxidation, chemical-vapor deposition, ion implantation Removal Etching, evaporation 10 Microstructure Fabrication, Continued

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11 MEMS Advantages The advantages of MEMS devices include Size High sensitivity Low noise Reduced cost The applications for MEMS are so far reaching that a multi-billion dollar market is forecast. Key industry applications include transportation, telecommunications and healthcare.

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Accelerometers Micro Optical Electro Mechanical Systems (MOEMS) Digital Mirror Devices (DMD) used in Projection Devices Deformable mirrors Optical Switches Inkjet Print heads (Microfluidics) Pressure Sensors  Seismic Activities - Thermal transfer 12 Current Applications

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Micro-arrayed biosensors Virus detection Neuron probes (nerve damage/repair) Retina/Cochlear Implants Micro Needles ChemLab Micro Fluidic Pumps Insulin Pump (drug delivery) 13 Biomedical Current Applications, Continued

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Hand held detectors – biological & chemical microsensors Chem’s Lab on a Chip (security applications) Data Storage Systems IBM Millipede storage system – AFM tip writes data bit by melting a depression into polymer mediaum and reads data by sensing depressions. 14 Detection systems Current Applications, Continued

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Nanotechnology manipulation of matter at the nanometer scale. Nanomaterials Started with carbon. Behavior depends on morphology. 15 carbon and carbon nanotube NEMS and Nanotechnology

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Quantum dots Nanowires Quantum films 16 Quantum Dots. NEMS and Nanotechnology, Continued

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17 Electrostatic manipulation Moving one electron or molecule at a time Patterning Dip Pen Lithography Electron Beam Lithography Nano Fabrication NEMS and Nanotechnology, Continued

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18 Cantilever Sensors Mass Storage (IBM) Millipede chip Nanochip Molecular Electronics Transistors Memory cells Nanowires Nanoswitches Merging of technologies

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19 Cantilever sensors are essentially MEMS cantilevers with chemical arrays attached. The cantilevers, acting much like tuning forks, have a natural frequency of vibration which changes as more mass is attached (nano function). The change in frequency is sensed by the MEMS device indicating a measurable presence in the system of particular reacting compound. Cantilever sensor Merging of technologies NEMS and Nanotechnology, Continued

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Potential Positive Impacts Reduction of disease. Job opportunities in new fields. Low-cost energy. Cost reductions with improved efficiencies. Improved product and building materials. Transportation improvements Potential Negative Impacts Material toxicity Non-biodegradable materials. Unanticipated consequences. Job losses due to increased manufacturing efficiencies. 20 Impact of Miniaturization

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Fundamental and applied research Engineering and technological developments Low Cost Fabrication “Molecular manufacturing” 21 Challenges and Possibilities

References : 

References Gad-el-Hak, M. MEMS, Design and Fabrication, Second Edition. (2005) Lyshevski, S., MEMS and NEMS, CRC Press LLC. (2002) Maluf, N. and Williams, K., An Introduction to Micromechanical Systems Engineering, Second Edition, Artechouse, Inc. (2004) Microsytems, Same-Tec 2005 Preconference Workshop, July 25 &26, 2005. Taylor and Francis, MEMS Introductory Course, Sandia National Laboratories, June 13-15, 2006. What is MEMS technology? MEMS and Nanotechnology Clearinghouse. http://www.memsnet.org/mems/what-is.html. 22

THANKS : 

THANKS 23