Coagulation Jar-Test of CMP Wastewater

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Added: June 24, 2009 This Presentation is Public 
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Slide 1:1 Coagulation jar-test of CMP wastewater in semiconductor industry


????? :2 ????? ????:??? ??? ??:952746 ??? ??:952708 ??? 952736 ??? 952744 ??? 952751 ??? 952764 ???


?? :3 ?? ???? ???? ??????? ???? ??????? ?? ????


???? :4 ???? ??PAC?pH?polymer???????,???????CMP ?????????,???????????????,???????????????,???,??????????????


???? :5 ???? ??CMP????????????????,??????????????????,???????????pH???????????


???? :6 ???? ???? ???? 1000ml??*5 pH?(pH???????) ???? ??? ????? ????(????? ??????????) ???(???) ??? DO???(DO???????) ?????(10ml)?????????


???? :7 ???? CMP????(25? ppm) PAC(????)10% Polymer(???)3000ppm 1M H2SO4 0.1M NaOH 1M NaOH ???? ???


???? :8 ???? ???(CMP wastewater 250000ppm) 5ml???500ml(2500ppm)??? ????pH??????? ??????pH????5.6.7.8.9 ??0.2ml(0.4ml)????(PAC)??1?? ???????? ??3??(90rpm) ?(??)polymer? ??15??(25rpm) ??1?? ?????pH? ? ??? ???? pH??12 ??? PAC 0.1 ,0.2 ,0.4, 0.8, 1.0 ml ??pH,??,???


???? :9 ???? ?????(x3): 0.2ml PAC ?polymer(?4?) ?????(x3): 0.2ml PAC ??polymer ?????(x3): 0.4ml PAC ?polymer(?4?) ?????(x3): 0.4ml PAC ??polymer


??????? :10 ???????pH?? ??????? ???????,??0.2mlPAC?0.4mlPAC?CMP????pH???????(???9),??????????pH???????pH?????????(???3)?


Slide 11:11 ????,PAC???????????????????,? 0.2ml PAC????????? 0.4ml PAC???????


Slide 12:12 ?????????????,??????????,???????,?pH??8?,PAC?????0.2ml???????????,?pH?7?????0.4ml PAC???????


???????pH??? :13 ???????pH??? ???????,??????,?????pH?????,????pH?????,?????


???????????? :14 ???????????? ?????????PAC???????????????,polymer????????????


??????????? :15 ??????????? ???????PH??7?,??0.4ml PAC ?????????????


Slide 16:16 ???????? ???,PAC?????PH??????,?2??????,?0.2ml PAC??????? ?????????,PAC????????????pH?,???????????pH????PAC????????, ??????????????pH????????????


Slide 17:17 ????,PAC?????,???????,????????????????


Slide 18:18 ???,????????1??????,???????????,??????


???? :19 ???? 9612??????-??? jar-test ???? ???


Slide 20:20 Thank you for your attention