Coagulation jar-test of CMP wastewater

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Slide 1: 

1 Coagulation jar-test of CMP wastewater in semiconductor industry

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2 ????? ????:??? ??? ??:952746 ??? ??:952708 ??? 952736 ??? 952744 ??? 952751 ??? 952764 ???

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3 ?? ???? ???? ??????? ???? ??????? ?? ????

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4 ???? ??PAC?pH?polymer???????,???????CMP ?????????,???????????????,???????????????,???,??????????????

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5 ???? ??CMP????????????????,??????????????????,???????????pH???????????

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6 ???? ???? ???? 1000ml??*5 pH?(pH???????) ???? ??? ????? ????(????? ??????????) ???(???) ??? DO???(DO???????) ?????(10ml)?????????

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7 ???? CMP????(25? ppm) PAC(????)10% Polymer(???)3000ppm 1M H2SO4 0.1M NaOH 1M NaOH ???? ???

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8 ???? ???(CMP wastewater 250000ppm) 5ml???500ml(2500ppm)??? ????pH??????? ??????pH????5.6.7.8.9 ??0.2ml(0.4ml)????(PAC)??1?? ???????? ??3??(90rpm) ?(??)polymer? ??15??(25rpm) ??1?? ?????pH? ? ??? ???? pH??12 ??? PAC 0.1 ,0.2 ,0.4, 0.8, 1.0 ml ??pH,??,???

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9 ???? ?????(x3): 0.2ml PAC ?polymer(?4?) ?????(x3): 0.2ml PAC ??polymer ?????(x3): 0.4ml PAC ?polymer(?4?) ?????(x3): 0.4ml PAC ??polymer

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10 ???????pH?? ??????? ???????,??0.2mlPAC?0.4mlPAC?CMP????pH???????(???9),??????????pH???????pH?????????(???3)?

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11 ????,PAC???????????????????,? 0.2ml PAC????????? 0.4ml PAC???????

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12 ?????????????,??????????,???????,?pH??8?,PAC?????0.2ml???????????,?pH?7?????0.4ml PAC???????

???????pH??? : 

13 ???????pH??? ???????,??????,?????pH?????,????pH?????,?????

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14 ???????????? ?????????PAC???????????????,polymer????????????

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15 ??????????? ???????PH??7?,??0.4ml PAC ?????????????

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16 ???????? ???,PAC?????PH??????,?2??????,?0.2ml PAC??????? ?????????,PAC????????????pH?,???????????pH????PAC????????, ??????????????pH????????????

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17 ????,PAC?????,???????,????????????????

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18 ???,????????1??????,???????????,??????

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19 ???? 9612??????-??? jar-test ???? ???

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20 Thank you for your attention